JPH0530347Y2 - - Google Patents
Info
- Publication number
- JPH0530347Y2 JPH0530347Y2 JP1987098526U JP9852687U JPH0530347Y2 JP H0530347 Y2 JPH0530347 Y2 JP H0530347Y2 JP 1987098526 U JP1987098526 U JP 1987098526U JP 9852687 U JP9852687 U JP 9852687U JP H0530347 Y2 JPH0530347 Y2 JP H0530347Y2
- Authority
- JP
- Japan
- Prior art keywords
- ray
- support plate
- frame
- transparent thin
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 claims description 22
- 239000010409 thin film Substances 0.000 claims description 18
- 238000005530 etching Methods 0.000 claims description 14
- 230000001681 protective effect Effects 0.000 claims description 6
- 230000003014 reinforcing effect Effects 0.000 claims description 6
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 229920006332 epoxy adhesive Polymers 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 238000001015 X-ray lithography Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987098526U JPH0530347Y2 (en]) | 1987-06-29 | 1987-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987098526U JPH0530347Y2 (en]) | 1987-06-29 | 1987-06-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS645434U JPS645434U (en]) | 1989-01-12 |
| JPH0530347Y2 true JPH0530347Y2 (en]) | 1993-08-03 |
Family
ID=31324878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987098526U Expired - Lifetime JPH0530347Y2 (en]) | 1987-06-29 | 1987-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530347Y2 (en]) |
-
1987
- 1987-06-29 JP JP1987098526U patent/JPH0530347Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS645434U (en]) | 1989-01-12 |
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